Open AccessMagnetron sputtering of (TiZr)NiSn thin films on different substrates for thermoelectric applications
Author(s) -
Wilfried Wunderlich,
Yoshiaki Shinohara,
Yoshito Matsumura
Publication year - 2012
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/379/1/012005
Subject(s) - materials science , thermoelectric effect , thin film , seebeck coefficient , sputter deposition , wafer , metallurgy , cavity magnetron , sputtering , diffraction , thermoelectric materials , optoelectronics , composite material , nanotechnology , optics , thermal conductivity , thermodynamics , physics