Open AccessPressure dependence of the quality factor of a micromachined cantilever in rarefied gases
Author(s) -
Matthias Stifter,
M. Sachse,
Thilo Sauter,
Wilfried Hortschitz,
Franz Keplinger
Publication year - 2012
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/362/1/012033
Subject(s) - cantilever , knudsen number , mechanics , materials science , range (aeronautics) , vibration , direct simulation monte carlo , quality (philosophy) , monte carlo method , physics , acoustics , composite material , quantum mechanics , mathematics , dynamic monte carlo method , statistics