Open AccessStructural properties of ZnO layers deposited on glass substrates by PECVD
Author(s) -
S. Kitova,
R Kazakov,
G. Danev
Publication year - 2012
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/356/1/012024
Subject(s) - plasma enhanced chemical vapor deposition , materials science , optoelectronics , chemical vapor deposition