Open AccessInternational MEMS Conference 2006
Author(s) -
Francis Eng Hock Tay,
Miao Jianmin,
John C. Bergstrom,
Ciprian Iliescu
Publication year - 2006
Publication title -
journal of physics. conference series
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/34/1/e01
Subject(s) - theme (computing) , microelectromechanical systems , engineering ethics , engineering , engineering management , nanotechnology , computer science , materials science , world wide web