Open AccessMicrofabrication of PZT force sensors for minimally invasive surgical tools
Author(s) -
S. Ezhilvalavan,
Zaoli Zhang,
Jeremy Loh,
Jackie Y. Ying
Publication year - 2006
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/34/1/162
Subject(s) - materials science , photoresist , undercut , fabrication , microfabrication , lead zirconate titanate , ferroelectricity , etching (microfabrication) , isotropic etching , electrode , piezoelectricity , microactuator , optoelectronics , nanotechnology , microelectromechanical systems , composite material , actuator , dielectric , electrical engineering , medicine , alternative medicine , pathology , chemistry , engineering , layer (electronics)