Open AccessIntegration of indium phosphide thin film structures on silicon substrates by direct wafer bonding
Author(s) -
J. Arokiaraj,
S. Vicknesh,
A. Ramam
Publication year - 2006
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/34/1/066
Subject(s) - materials science , wafer , thin film , substrate (aquarium) , indium phosphide , epitaxy , wafer bonding , optoelectronics , silicon , raman spectroscopy , indium , nanotechnology , layer (electronics) , optics , gallium arsenide , oceanography , physics , geology