Open AccessFabrication of capacitive absolute pressure sensor using Si-Au eutectic bonding in SOI wafer
Author(s) -
Kang Ryeol Lee,
Kunnyun Kim,
Hyo-Derk Park,
Yong Kook Kim,
Seung-Woo Choi,
Woo Beom Choi
Publication year - 2006
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/34/1/064
Subject(s) - eutectic system , silicon on insulator , capacitive sensing , fabrication , wafer , eutectic bonding , materials science , wafer bonding , pressure sensor , optoelectronics , composite material , mechanical engineering , electrical engineering , silicon , engineering , medicine , alternative medicine , alloy , pathology