Open AccessDesign of novel mechanical coupling for contour mode piezoelectric RF MEMS filters
Author(s) -
P.J. Stephanou,
Gianluca Piazza,
Carolyn D. White,
Muthu B. J. Wijesundara,
Albert P. Pisano
Publication year - 2006
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/34/1/056
Subject(s) - resonator , microelectromechanical systems , materials science , coupling (piping) , piezoelectricity , fabrication , electromechanical coupling coefficient , acoustics , cmos , electronic engineering , optoelectronics , engineering , physics , medicine , alternative medicine , pathology , metallurgy , composite material