Open AccessDesign, fabrication and characterization of an air-driven micro turbine device
Author(s) -
Xuechuan Shan,
Qide Zhang,
Yuhao Sun,
Zhenfeng Wang
Publication year - 2006
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/34/1/052
Subject(s) - deep reactive ion etching , fabrication , ram air turbine , wafer , materials science , rotor (electric) , turbine , compressed air , mechanical engineering , bearing (navigation) , etching (microfabrication) , silicon , turbine blade , characterization (materials science) , reactive ion etching , composite material , optoelectronics , engineering , computer science , nanotechnology , medicine , alternative medicine , pathology , artificial intelligence , layer (electronics)