
Nanoindentation of semiconductors: experiment and atomistic simulations
Author(s) -
D. Chrobak,
Roman Nowak
Publication year - 2011
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/281/1/012028
Subject(s) - nanoindentation , materials science , semiconductor , nanotechnology , engineering physics , physics , composite material , optoelectronics