Open AccessMorphological Study Of Palladium Thin Films Deposited By Sputtering
Author(s) -
Karen Lizeth Salcedo,
Carlos Aníbal Rodríguez,
Felio Pérez,
Henry Riascos
Publication year - 2011
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/274/1/012120
Subject(s) - sputtering , palladium , materials science , thin film , metallurgy , nanotechnology , chemistry , catalysis , biochemistry