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Design and fabrication of a bidimentional microbolometer array for Terahertz detection characterized at different temperatures
Author(s) -
Abdú Orduña-Díaz,
E. CastilloDomínguez,
A. TorresJácome,
Francisco Javier De la Hidalga-Wade,
Carlos G. TreviñoPalacios
Publication year - 2011
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/274/1/012112
Subject(s) - microbolometer , terahertz radiation , fabrication , materials science , optoelectronics , bolometer , nanotechnology , detector , optics , physics , medicine , alternative medicine , pathology

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