Open AccessNanocharacterization of TiN films obtained by Ion Vapor deposition
Author(s) -
Arturo Plata,
Yezid Torres,
M Lasprilla,
Valeriy Dugar Zhabon
Publication year - 2011
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/274/1/012070
Subject(s) - tin , ion plating , deposition (geology) , materials science , ion , chemical vapor deposition , chemical engineering , engineering physics , nanotechnology , metallurgy , chemistry , thin film , geology , physics , engineering , organic chemistry , paleontology , sediment