Open AccessAberration-corrected STEM: current performance and future directions
Author(s) -
Peter D. Nellist,
M. F. Chisholm,
Andrew R. Lupini,
Albina Y. Borisevich,
W.H. Sides,
Stephen J. Pennycook,
Niklas Dellby,
R. Keyse,
O. L. Krivanek,
Matthew F. Murfitt,
Zoltan Szilágyi
Publication year - 2006
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/26/1/002
Subject(s) - current (fluid) , psychology , engineering , electrical engineering
Through the correction of spherical aberration in the scanning transmission electron microscope (STEM), the resolving of a 78 pm atomic column spacing has been demonstrated along with information transfer to 61 pm. The achievement of this resolution required careful control of microscope instabilities, parasitic aberrations and the compensation of uncorrected, higher order aberrations. Many of these issues are improved in a next generation STEM fitted with a new design of aberration corrector, and an initial result demonstrating aberration correction to a convergence semi-angle of 40 mrad is shown. The improved spatial resolution and beam convergence allowed for by such correction has implications for the way in which experiments are performed and how STEM data should be interpreted