Open AccessEnergy filtered scanning electron microscopy: applications to characterisation of semiconductors
Author(s) -
Cornelia Rodenburg,
Mark A. Jepson,
Beverley J. Inkson,
Eric Bosch,
C. J. Humphreys
Publication year - 2010
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/241/1/012074
Subject(s) - scanning electron microscope , semiconductor , limiting , secondary electrons , electron , scanning confocal electron microscopy , materials science , energy filtered transmission electron microscopy , conventional transmission electron microscope , electron microscope , energy (signal processing) , scanning transmission electron microscopy , nanotechnology , optics , analytical chemistry (journal) , optoelectronics , chemistry , physics , composite material , engineering , quantum mechanics , mechanical engineering , chromatography