Open AccessA MEMS high g acceleration sensor simulation analysis
Author(s) -
Yujun Yang,
Peng Wang,
Manlong Chen,
Fan Yang,
Y. T. Liang,
Fangfang Chen
Publication year - 2022
Publication title -
journal of physics. conference series
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/2355/1/012037
Subject(s) - acceleration , wheatstone bridge , sensitivity (control systems) , cantilever , interference (communication) , focus (optics) , microelectromechanical systems , finite element method , collision , transverse plane , beam (structure) , aerospace , acoustics , physics , computer science , engineering , electronic engineering , aerospace engineering , electrical engineering , optoelectronics , optics , structural engineering , resistor , channel (broadcasting) , computer security , classical mechanics , voltage