Open AccessDesign and fabrication of piezoelectrically driven deformable reflective micromirrors based on MEMS technology
Author(s) -
Yi Wang,
Yigui Li
Publication year - 2022
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/2334/1/012004
Subject(s) - microelectromechanical systems , materials science , miniaturization , fabrication , deep reactive ion etching , deformable mirror , eutectic bonding , piezoelectricity , photolithography , etching (microfabrication) , optoelectronics , lithography , optics , reactive ion etching , interferometry , surface micromachining , eutectic system , nanotechnology , adaptive optics , composite material , layer (electronics) , medicine , alternative medicine , physics , alloy , pathology