Open AccessFlexible miniaturized thin film thermocouples arrays for high temperature applications
Author(s) -
Yang Liu,
Hongchuan Jiang,
Xiaohui Zhao,
Xiaojun Deng,
Wanli Zhang
Publication year - 2022
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/2334/1/012003
Subject(s) - thermocouple , materials science , thin film , thermoelectric effect , calibration , microstructure , repeatability , scanning electron microscope , sputter deposition , bending , temperature measurement , cavity magnetron , analytical chemistry (journal) , composite material , optoelectronics , sputtering , optics , nanotechnology , chemistry , thermodynamics , statistics , physics , mathematics , chromatography