Open AccessDesign of readout circuit for high sampling miniaturized MEMS wall shear force sensor
Author(s) -
Zhijiang Guo,
Hui Guo,
tingting Liu,
Yang Gao
Publication year - 2022
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/2302/1/012003
Subject(s) - capacitance probe , microelectromechanical systems , capacitance , signal (programming language) , parasitic capacitance , wind tunnel , electronic engineering , engineering , acoustics , printed circuit board , shock (circulatory) , materials science , electrical engineering , capacitor , computer science , optoelectronics , voltage , physics , aerospace engineering , electrode , quantum mechanics , programming language , medicine