Open AccessHole taper control in femtosecond pulsed laser drilling of silicon carbide ceramic
Author(s) -
Hongjian Wang,
Tao Yang,
Xiaoxue Wu,
Fu-Qin Deng
Publication year - 2022
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/2285/1/012039
Subject(s) - silicon carbide , spiral (railway) , materials science , ceramic , laser , femtosecond , drilling , silicon , optics , scanning electron microscope , laser scanning , cylinder , composite material , optoelectronics , metallurgy , mechanical engineering , physics , engineering