Open AccessTuning the optical and electrical properties of HiPIMS-ITO films by variation of annealing temperature
Author(s) -
Jin-Fa Zhang,
Ming-Jie Zhao
Publication year - 2022
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/2276/1/012041
Subject(s) - high power impulse magnetron sputtering , materials science , annealing (glass) , thin film , indium tin oxide , grain size , sputter deposition , transmittance , optoelectronics , analytical chemistry (journal) , sputtering , nanotechnology , composite material , chemistry , chromatography