Open AccessAnalysis and Enhancement of Q-Factor in Thin-Film Bulk Acoustic Wave Resonator (FBAR)
Author(s) -
P K Joshi,
K R Latwe,
M A Hasamnis
Publication year - 2022
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/2273/1/012010
Subject(s) - resonator , materials science , microelectromechanical systems , q factor , piezoelectricity , quality (philosophy) , optoelectronics , wireless , acoustics , electrode , bluetooth , electrical engineering , telecommunications , computer science , composite material , engineering , physics , quantum mechanics