Open AccessApplication of plasma methods for the synthesis of nanostructures
Author(s) -
A. A. Masyanov
Publication year - 2022
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/2270/1/012051
Subject(s) - plasma , nanostructure , cathode , materials science , sputtering , deposition (geology) , nanotechnology , chemical vapor deposition , plasma processing , arc (geometry) , chemical engineering , chemistry , thin film , physics , engineering , nuclear physics , mechanical engineering , paleontology , sediment , biology