Open AccessInvestigation of the structure of an aluminum nitride film for a Bragg reflector obtained by magnetron sputtering
Author(s) -
L Baranova,
B Baysova,
V Strunin
Publication year - 2022
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/2270/1/012044
Subject(s) - materials science , sputter deposition , nitride , sputtering , aluminium , aluminium nitride , cavity magnetron , phase (matter) , optoelectronics , high power impulse magnetron sputtering , distributed bragg reflector , deposition (geology) , thin film , composite material , nanotechnology , layer (electronics) , chemistry , wavelength , paleontology , organic chemistry , sediment , biology