Open AccessSpectral studies of inductively coupled plasma characteristics of low pressure discharges for two configurations of vacuum chambers
Author(s) -
Yu A Shemakhin,
E S Samsonova,
E F Voznesenskiy,
Y. O. Zhelonkin,
E Yu Shemakhin,
S A Fadeev,
T N Terentev,
R.A. Maksimov,
V A Tyurin
Publication year - 2022
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/2270/1/012007
Subject(s) - inductively coupled plasma , plasma , argon , electron temperature , atomic physics , electron , inductively coupled plasma atomic emission spectroscopy , materials science , range (aeronautics) , plasma parameters , plane (geometry) , chemistry , analytical chemistry (journal) , physics , nuclear physics , geometry , mathematics , chromatography , composite material