Open AccessBiocompatible Hydrogel Modified Silicon Nanowire Field Transistor for Highly Sensitive pH Detection
Author(s) -
Gangrong Li,
Qianhui Wei,
Qingzhu Zhang,
Feng Wei
Publication year - 2022
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/2248/1/012005
Subject(s) - materials science , field effect transistor , self healing hydrogels , nanowire , transistor , nanotechnology , polymerization , silicon , biosensor , chemical engineering , optoelectronics , polymer chemistry , voltage , composite material , polymer , electrical engineering , engineering
In this work, a silicon nanowire field-effect transistor (SiNW FET) device was developed and applied to pH sensing. A hydrogel was synthesized by radical polymerization as the dielectric and functional layer of SiNW FET. The spin coating process of the hydrogel was defined through different rotating speed. The results revealed that the suitable glue mixing process was determined to be 500 rpm/min at low speed and 4500 rpm/min at high speed. We demonstrated the effect of pH solutions on the sensitivity of the SiNW FET sensor modified by hydrogel. The SiNW FET sensor was used to detect a solution pH ranging from 5 to 11, with the response current increasing stepwise as the pH value increased. Compared with SiNW FET, the hydrogel-coated SiNW FET had higher sensitivity and time response rate for pH sensing. The obtained results demonstrated that modification of hydrogels can significantly increase the pH sensing properties of SiNW FET.