
Semi-infinite photocarrier radiometric model for the characterization of semiconductor wafer
Author(s) -
Xianming Liu,
Bincheng Li,
Qiuping Huang
Publication year - 2010
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/214/1/012115
Subject(s) - wafer , semiconductor , materials science , optics , semiconductor laser theory , modulation (music) , optoelectronics , laser , physics , acoustics