Open AccessLaue diffraction of X-ray microbeams by multilayers
Author(s) -
В. И. Пунегов
Publication year - 2021
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/2103/1/012145
Subject(s) - diffraction , optics , fresnel diffraction , physics , reciprocal lattice , x ray crystallography , x ray , dynamical theory of diffraction , reciprocal , kirchhoff's diffraction formula , geometrical optics , geometry , diffraction grating , acousto optics , mathematics , linguistics , philosophy
Laue diffraction theory of X-ray microbeams in multilayers (MLs) is developed. The solution for calculating X-ray reciprocal space maps is obtained. The pendulum ( Pendellösung ) effect for perfect and imperfect MLs is shown. The numerical simulation of Laue diffraction in Mo/Si multilayers with boundary conditions in the case of geometrical optics and the Fresnel approximation is carried out. It is shown that for X-ray microbeams one should to take into account the diffraction of X-ray waves at the edges of slits (collimators) of the diffraction scheme.