Open AccessCreation of micro-and nanochannels on the surface of silicon chips by lithography methods and investigation of ion transport in channel
Author(s) -
P. K. Afonicheva,
Д. В. Лебедев,
Anton Bukatin,
I. S. Mukhin,
A. A. Evstrapov
Publication year - 2021
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/2103/1/012112
Subject(s) - microchannel , materials science , nanotechnology , lithography , microfluidics , fabrication , silicon , focused ion beam , soft lithography , optoelectronics , maskless lithography , ion , electron beam lithography , resist , chemistry , layer (electronics) , medicine , alternative medicine , organic chemistry , pathology
We developed a technique for fabrication microfluidic silicon-glass chips with a system of nanochannels connecting two microchannel using traditional optical lithography and a focused ion beam. To investigate the transport phenomena in the nanochannels we experimentally studied their ion conductivity and using optical microscopy confirmed the existence of the diffusion flow through them. The developed method allows us to create systems of nanochannels with on-purpose geometry and controlled sizes. Devices with such nanochannels can be applied in the creation of biosensor devices and for genetic studies.