Open AccessFabrication and complex investigation of LAFE based on CNT by PECVD with island catalyst
Author(s) -
Maksim A. Chumak,
A. A. Rokacheva,
L. A. Filatov,
Anatoly G. Kolosko,
Sergey V. Filippov,
E. O. Popov
Publication year - 2021
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/2103/1/012110
Subject(s) - field electron emission , materials science , substrate (aquarium) , plasma enhanced chemical vapor deposition , catalysis , carbon nanotube , common emitter , fabrication , nanotechnology , sample (material) , ferrocene , optoelectronics , field (mathematics) , analytical chemistry (journal) , electrode , thin film , chemistry , electrochemistry , physics , alternative medicine , oceanography , pathology , chromatography , quantum mechanics , electron , medicine , geology , mathematics , biochemistry , pure mathematics
This paper presents a study of large area field emitter based on carbon nanotubes grown by PECVD method on Si/SiO2 substrate with Fe catalyst. The catalyst was deposited by CVD on the substrate from ferrocene in the form of islands. The sample creation technology was described and results of the emission properties study were presented. Current-voltage characteristics were registered and tested for compliance with the cold field emission regime. The fluctuation statistic of effective microscopic parameters was constructed. Using data from a computerized field projector, the emission profile of the sample was calculated.