Open AccessElectrophoretic deposition and capacitive characteristics of composite electrode materials based on CNTs and ruthenium oxide for planar supercapacitors
Author(s) -
Yu. I. Kakovkina,
É. A. Lebedev,
E. P. Kitsyuk,
Dmitry A. Kuzmin,
A. V. Alekseyev,
Yu. P. Shaman
Publication year - 2021
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/2086/1/012183
Subject(s) - electrophoretic deposition , supercapacitor , microelectronics , materials science , ruthenium oxide , electrode , deposition (geology) , capacitor , oxide , nanotechnology , composite number , capacitive sensing , planar , ruthenium , pulsed laser deposition , chemical engineering , capacitance , electrochemistry , composite material , thin film , voltage , electrical engineering , chemistry , computer science , metallurgy , organic chemistry , coating , computer graphics (images) , engineering , biology , paleontology , catalysis , sediment
In this work, a method for the formation of planar supercapacitors, which combines electrophoretic deposition of composite electrode materials based on CNTs and ruthenium oxide, and laser engraving, is proposed. The features of electrophoretic deposition are considered and the influence of the main technological modes on the morphology and composition of the formed layers of electrode materials is determined. The conducted studies of the electrophysical characteristics of the formed samples confirmed the possibility of producing planar capacitors with a high capacity and their potential applicability for a number of applications in microelectronics.