Open AccessDesign and Simulation of the Two-Axis Micromachined Angular Rate Sensor
Author(s) -
Igor Lysenko,
M. A. Denisenko,
Alina S. Isaeva
Publication year - 2021
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/2086/1/012176
Subject(s) - gyroscope , accelerometer , vibrating structure gyroscope , inclinometer , rate integrating gyroscope , inertia , microelectromechanical systems , compensation (psychology) , angular velocity , sensitivity (control systems) , computer science , physics , engineering , electronic engineering , aerospace engineering , optoelectronics , classical mechanics , geology , psychology , geodesy , psychoanalysis , operating system
Micromechanical inertia sensors - accelerometers, gyroscopes, multisensor modules and systems based on them - are widely used in navigation, for compensation of other instruments (accelerometers, inclinometers) or stabilization (gyroscopes). The paper presents the designed construction of a MEMS angular rate sensor with two sensitivity axes, topology of gyroscope is presented; modal and static analysis is performed using ANSYS CAD; simulation results of micromechanical gyroscope operation under the action of angular velocities using VHDL-AMS are presented.