Open AccessSynthesis and studying properties of the GNPs@FexOy structure
Author(s) -
Polina Bespalova,
Alexandr Vorobyev,
Anastasiya Speshilova,
Vitaly Studzinsky,
E A Patirimova,
P. A. Karasev,
М. В. Мишин
Publication year - 2021
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/2086/1/012132
Subject(s) - annealing (glass) , chemical vapor deposition , oxide , wafer , materials science , silicon , analytical chemistry (journal) , silicon oxide , deposition (geology) , iron oxide , fourier transform infrared spectroscopy , chemical engineering , mineralogy , nanotechnology , chemistry , metallurgy , environmental chemistry , geology , paleontology , silicon nitride , sediment , engineering
An article presents a study of the regularities of the formation of gold up to 8 nm thick, deposited by vacuum thermal deposition on silicon wafers with a natural oxide, its annealing and subsequent deposition of iron oxide by chemical vapor deposition. The stages were accompanied by SEM analysis of the sample surface, as well as fixation of the optical and FTIR spectra, I–V characteristics of the obtained structures.