Open AccessInfluence of ultrasonic treatment on the change of monocrystalline silicon defective region
Author(s) -
Alexander Solovyev,
В. В. Рыбин,
Artem V. Kulagin
Publication year - 2021
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/2086/1/012035
Subject(s) - monocrystalline silicon , ultrasonic sensor , silicon , materials science , action (physics) , composite material , acoustics , optics , optoelectronics , physics , quantum mechanics
The article presents the results of an experimental study of ultrasonic action on monocrystalline silicon samples. The influence of the processing modes on the surface strength of the material under study was found.