Open AccessPrecise Linear Positioning Method Based on Transmissive Two-Stage Diffraction Grating System
Author(s) -
Jin Lu,
Jiannan Lu,
Jun Ma,
Zaiwu Gong
Publication year - 2021
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/2083/2/022037
Subject(s) - diffraction , grating , diffraction grating , positioning system , optics , displacement (psychology) , blazed grating , computer science , acousto optics , materials science , physics , acoustics , psychotherapist , psychology , node (physics)
This paper mainly studies the precise linear positioning method based on the transmissive type two-stage diffraction grating system. Starting from the analysis of the two-stage diffraction principle, the mathematical model of the two-stage grating diffraction is established, and the positioning characteristics of the differential positioning method and the modified positioning method are discussed. The simulation experiment of the linear positioning device is carried out to study the displacement characteristics. The experimental results show that the precise positioning based on the diffraction grating can obtain a positioning accuracy of ±0.4 μm.