Open AccessEvaluation of magnetic properties of thin magneto-dielectric films deposited from beam plasma in medium vacuum
Author(s) -
D.B. Zolotukhin,
A.V. Tyunkov,
Yu. G. Yushkov
Publication year - 2021
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/2064/1/012073
Subject(s) - materials science , electron beam physical vapor deposition , dielectric , thin film , substrate (aquarium) , plasma , ceramic , evaporation , cathode ray , vacuum evaporation , magneto , optoelectronics , composite material , electron , magnet , nanotechnology , electrical engineering , physics , oceanography , quantum mechanics , geology , thermodynamics , engineering
By electron-beam evaporation of a solid state dielectrics (alumina ceramics) and a magnetic material (steel-3) in fore-vacuum, thin films of several μm, possessing both dielectric and magnetic properties, were deposited on a substrate. The work shows that the microstrip resonator method can be used to assess the presence of magnetic properties in films.