Open AccessDeposition of boron films using a discharge system with a hot boron anode
Author(s) -
В. В. Шугуров,
Yu. F. Ivanov
Publication year - 2021
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/2064/1/012068
Subject(s) - anode , boron , materials science , cathode , deposition (geology) , evaporation , electric arc , current (fluid) , analytical chemistry (journal) , metallurgy , electrode , electrical engineering , chemistry , thermodynamics , paleontology , physics , organic chemistry , chromatography , sediment , biology , engineering
This work describes a discharge system for heating and evaporation of a boron powder target based on a non-self-sustained arc discharge with a filament, a hollow cathode and a hot combined anode. The measurements of the current-voltage characteristics of the discharge with a hot anode and the dependence of the anode temperature on the discharge parameters are presented. The modes of deposition of boron films have been determined.