Open AccessInvestigation of the plasma composition of a discharge with a self-heating hollow cathode and an active anode in a gas mixture with titanium and hexamethyldisilazane vapors
Author(s) -
A. I. Men’shakov,
Yu A. Bruhanova,
Yu. S. Surkov,
П. А. Скорынина
Publication year - 2021
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/2064/1/012046
Subject(s) - cathode , gas composition , anode , plasma , volumetric flow rate , titanium , analytical chemistry (journal) , decomposition , torr , materials science , deposition (geology) , chemistry , chemical engineering , electrode , metallurgy , chromatography , organic chemistry , physics , quantum mechanics , engineering , thermodynamics , paleontology , sediment , biology
The analysis of composition of low-pressure (~0.1-1 mTorr) hollow cathode arc plasma in Ar+N2 gas mixture with Ti+hexamethyldisilazane vapors was carried out by optical emission spectroscopy. The influence of HMDS flow rate (1-10 g/h), discharge current (10-50 A) and Ti-vapors flow on hexamethyldisilazane decomposition degree and plasma composition and was investigated. The proposed plasma activation method provides both an intense flow and a high activation degree of metal vapors, and a sufficient decomposition degree of precursor vapors for the formation of solid TiSiCN coatings at a high deposition rate. Test coatings with a thickness of 6 microns and a hardness of 31 GPa were obtained in 1 hour at 400ºC.