Open AccessComputational design and analysis of patterned micro-heaters with various thickness and trace width
Author(s) -
S N Waghmare,
Mohammed Adnan Hasan,
S. Manikandan,
Shubhabrata Datta
Publication year - 2021
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/2054/1/012083
Subject(s) - nichrome , multiphysics , materials science , mechanical engineering , work (physics) , trace (psycholinguistics) , layer (electronics) , voltage , optoelectronics , nuclear engineering , composite material , electrical engineering , engineering , structural engineering , finite element method , linguistics , philosophy
Micro heaters are important part in miniaturized heating applications. These applications required precise control of temperature over the applied surface that need to be heated. This present work is the computational study of the micro heater performance under various design criteria. Three different models of the heaters were studied for multi-physical phenomena, viz. the temperature uniformity and the mechanical stability. Effect of various parameters of the heaters, viz. pattern design, applied voltage and layer thickness, for nichrome (NiCr) based micro-heaters have been studied using COMSOL Multiphysics. Finally, conclusions are made by comparison of design parameters to reach best solution among nichrome micro-heaters.