Open AccessDesign and Fabrication of a Novel High Power THz Slow Wave Structure Based on MEMS Technology
Author(s) -
Heng Zheng,
Jinrong Yao,
Rui Zheng,
Qi Zhang,
Xinyu Lu
Publication year - 2021
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/2002/1/012059
Subject(s) - traveling wave tube , microelectromechanical systems , terahertz radiation , materials science , optics , bandwidth (computing) , electrical impedance , cathode ray , deep reactive ion etching , w band , fabrication , waveguide , power (physics) , optoelectronics , return loss , electrical engineering , amplifier , electron , antenna (radio) , etching (microfabrication) , engineering , physics , telecommunications , medicine , reactive ion etching , cmos , layer (electronics) , quantum mechanics , alternative medicine , pathology , composite material
With the development of TWT in terahertz band, the size of TWT is greatly reduced and the power gain is also reduced. In order to improve the performance of traveling wave tube (TWT), an E-plane and H-plane tapered folded waveguide slow wave structure operating at 0.34THz is designed. In order to reduce the RF loss, a gradual ridge is added to the E-plane ridge. Compared with other ridge loaded structures, the coupling impedance of this structure has been significantly improved, and it has better dispersion characteristics and higher maximum output power. According to the electromagnetic simulation results, under the condition of 16.8kV, 50mA banded electron beam, the maximum output power of the folded waveguide can reach 65.1w, the power gain can reach 31.8db, the 3dB working bandwidth can reach 12GHz, and the electronic efficiency can reach 7.75%. Finally, a complete DRIE process for processing slow wave structure is explored. The slow wave structure is fabricated by combining silicon with non-silicon.