Open AccessSurface morphology of nanostructured zinc oxide materials obtained by plasma-enhanced chemical vapor deposition
Author(s) -
Leonid Mochalov,
А. А. Логунов,
I. O. Prokhorov
Publication year - 2021
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1967/1/012049
Subject(s) - zinc , chemical vapor deposition , plasma , inductively coupled plasma , plasma processing , materials science , oxide , hydrogen , substrate (aquarium) , chemical engineering , analytical chemistry (journal) , plasma enhanced chemical vapor deposition , chemical composition , chemical reaction , nanostructure , deposition (geology) , chemistry , nanotechnology , metallurgy , environmental chemistry , paleontology , biochemistry , physics , oceanography , organic chemistry , quantum mechanics , sediment , geology , engineering , biology
Zinc oxide nanostructures have been obtained by plasma-enhanced chemical vapor deposition technique. High-purity elemental zinc was used as the precursor. RF (40MHz) inductively coupled plasma discharge was used for the initiation of the plasma-chemical reactions in the gas phase. Hydrogen-oxygen (H 2 -O 2 ) composition of various ratios was used as the source plasma gas mixture. The optical emission spectroscopy was used as the powerful tool to determine the intermediate excited particles and assume the possible mechanism of the plasma-chemical reactions. The paper also investigates the influence of the substrate’s materials, its temperature, and the power of the heat input into the discharge. The properties of the sprayed materials were characterized by the method of atomic force microscopy.