Open AccessComparative Study of the Structural Properties for Thin and Thick ZnO Films Deposited on PPC Plastic Substrates
Author(s) -
N. N. Jandow,
Ali A. Abbas,
Kh. G. Mohammed,
Nadir Fadhil Habubi,
F.K. Yam
Publication year - 2021
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1963/1/012074
Subject(s) - crystallite , wurtzite crystal structure , materials science , thin film , full width at half maximum , lattice constant , hexagonal crystal system , sputtering , phase (matter) , composite material , crystallography , analytical chemistry (journal) , zinc , nanotechnology , optoelectronics , metallurgy , optics , chemistry , diffraction , physics , organic chemistry , chromatography
ZnO films with various thicknesses (0.4, 0.6, 0.8, 1 and 1.3 μm) had been prepared on PPC plastic bases by using DC sputtering. XRD results showed that all the films displayed principally ZnO (002) peak at 2θ = 34.115°, 34.01, 34.16, 34.07 and 34.12° with FWHM of 0.41°, 0.34, 0.27, 0.21 and 0.368° respectively, which is coincide with wurtzite hexagonal phase, indicated that films were preferentially grown along c-axis. XRD results also showed that the lattice constant and the crystallite size for the deposited thin films became larger than those for the thick film 1.3 μm; while the stress and microstrain increased for the thick films.