Open AccessMetal-Ferroelectric-Metal Characterization for Optical Modulator
Author(s) -
N. A. Razilam,
Nurjuliana Juhari,
P. Poopalan
Publication year - 2021
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1962/1/012067
Subject(s) - materials science , ferroelectricity , annealing (glass) , metal , thin film , electrical resistivity and conductivity , characterization (materials science) , electrode , evaporation , optoelectronics , substrate (aquarium) , sol gel , analytical chemistry (journal) , nanotechnology , composite material , metallurgy , dielectric , chemistry , physics , oceanography , engineering , chromatography , geology , electrical engineering , thermodynamics
Thermal annealing was performed on fused silica substrate for metal-ferroelectric-metal (MFM) at 900°C for 2 hours by sol-gel coated of BaTiO 3 as ferroelectric material and e-beam evaporation of ITO as electrode. Standard optical and physical characterization were performed such as XRD, UV-VIS Spectrophotometer, AFM and Hall measurement for electrical properties. XRD patterns of thin films shows that the samples is crystalline in a cubic structure. Optical analysis showed high transparency at 400-800nm which is >80% transmission while the low resistivity for ITO ∼ 10 -3 .