Open AccessEffect of annealing on magnetic properties of Nd-Fe-B thin films prepared by ECR ion beam sputtering method
Author(s) -
Ryo Tokumaru,
Shinji Tamano,
Satoru Goto,
S. Madeswaran,
Kazuyasu Tokiwa,
T. Watanabe
Publication year - 2009
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/191/1/012021
Subject(s) - sputtering , materials science , annealing (glass) , thin film , ion , ion beam , analytical chemistry (journal) , metallurgy , chemistry , nanotechnology , organic chemistry , chromatography