Open AccessA software-hardware unit for studying the output characteristic of MEMS pressure sensors and its linearization
Author(s) -
A. A. Kabanov,
Alina M. Esimkhanova,
Galiikonova,
N. Yu Sirotenko,
Viktor Soloviev
Publication year - 2021
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1901/1/012009
Subject(s) - pressure sensor , linearization , debugging , software , computer science , process (computing) , virtual instrumentation , reliability (semiconductor) , automation , linearity , control engineering , nonlinear system , electronic engineering , computer hardware , engineering , mechanical engineering , power (physics) , physics , quantum mechanics , programming language , operating system
The paper presents the development of a linearization algorithm of the output parameters of the sensors based on the circuits that determine the static characteristics of the correction transducers, ensuring the linearity of the general conversion function with a given accuracy. Simulation modeling of correcting the output parameters of MEMS pressure sensors has been carried out. The qualitative characteristics of the measuring system are determined via providing the sensors with a means for determining the degree of reliability of their output data using a virtual exemplary tool. A technique for calibrating and linearizing the output characteristic of an analog MEMS pressure sensor has been developed. An algorithm for polynomial approximation of the nonlinear output characteristic of the sensor and a method for its implementation in Lab View software environment (by National Instruments) are presented. Virtual instruments developed in Lab View software environment have been the basis of software-hardware means for monitoring and processing of measuring data. The developed methodology and means of automation of measuring processes with the use of virtual devices made it possible to make the process of correcting the output parameters of sensors autonomous, independent of stationary measuring devices and debugging tools.