Open AccessFlat Film Structure Wireless Passive Pressure Sensor based on SiCN materials
Author(s) -
Caishun Wang,
Jiajia Zhang,
Xin Zhang,
Huan Li
Publication year - 2021
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1894/1/012030
Subject(s) - hfss , materials science , pressure sensor , wireless , sensitivity (control systems) , acoustics , bandwidth (computing) , resonator , wireless sensor network , optoelectronics , electronic engineering , antenna (radio) , electrical engineering , computer science , mechanical engineering , engineering , telecommunications , microstrip antenna , physics , computer network
In order to solve the measurement of air pressure in harsh environment, a new kind of wireless passive pressure sensor based on the amorphous SiCN material with high heat resistance was proposed. Ansoft HFSS software was used to study the relationship between the size of the rectangular resonator with the resonant frequency and quality factors. By optimizing the position and size of the sloped antenna, a wireless passive pressure sensor with high performance was designed. The sensitivity is 0.25mpa/GHZ and the bandwidth is 0.85GHZ of the pressure sensor at the working frequency of 6.8GHZ. This indicates its potential application in the harsh environment with high temperature.