Open AccessEmployment of Titanium dioxide thin film on NO2 gas sensing
Author(s) -
Israa Akram Abbas,
Salah Qaddoori Hazaa,
Seham Hassan Salman
Publication year - 2021
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1879/3/032061
Subject(s) - materials science , thin film , scanning electron microscope , titanium dioxide , analytical chemistry (journal) , spray pyrolysis , annealing (glass) , electrode , composite material , nanotechnology , chemistry , chromatography
TiO 2 thin films were deposited by Spray Pyrolysis with thickness ((350±25) nm) onto glass substrates at (350°C), and the film was annealed at temperatures (400 and 500)°C. The structural and morphological properties of the thin films (TiO 2 ) were investigated by X-ray diffraction, Field emission scanning electron microscopy and atomic force microscope. The gas sensor fabricated by evaporating aluminum electrodes using the annealed TiO 2 thin films as an active material. The sensitivity of the sensors was determined by change the electrical resistance towards NO 2 at different working temperatures (200 and 300)°C. It was determined that the fabricated sensor using TiO 2 thin film annealed at (400) °C with 8.28 nm particle size has high sensitivity than the thin films annealed at 500°C with 10.37 nm particle size. The sensor operated at 200°C had also sensitive to the NO 2 gas and its sensivity increased with operated temperatures at 300°C. It was observed that the fabricated sensors exhibited reproducible and stable results.