Open AccessContinuous terahertz wave imaging of microelectronics objects
Author(s) -
A. I. Berdyugin,
A. V. Badin
Publication year - 2021
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1862/1/012030
Subject(s) - microelectronics , terahertz radiation , materials science , optoelectronics , terahertz metamaterials , optics , chip , radiation , terahertz gap , photomixing , physics , far infrared laser , engineering , electrical engineering , laser
The results of using a terahertz imaging system for microelectronic flaw detection are presented. The distribution of the transmitted radiation through the plastic leaded chip carrier microchip at frequencies of 206 and 806 GHz is obtained. The possibility of using quasi-optical systems with a continuous terahertz radiation source for microelectronic flaw detection has been evaluated.