Open AccessDevelopment of a behavioural model of the MEMS accelerometer
Author(s) -
Igor Lysenko,
D Y Sevostyanov,
Ольга Александровна Ежова
Publication year - 2021
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1862/1/012010
Subject(s) - accelerometer , microelectromechanical systems , acceleration , transfer function , natural frequency , reliability (semiconductor) , computer science , finite element method , engineering , acoustics , structural engineering , materials science , physics , electrical engineering , vibration , nanotechnology , power (physics) , classical mechanics , quantum mechanics , operating system
This article presents a method for deriving the transfer function for the developed design of a micromechanical accelerometer. A behavioural model of the MEMS accelerometer has been developed taking into account its dynamic and static properties. The obtained simulation results confirm the reliability of the constructed model. For example, under the influence of 5g acceleration, the movement of the sensitive element is 0.9 µm. Reducing the natural frequency increases the stroke of the sensitive element by 0.5 µm.