Open AccessResearch on Automatic Labeling of Contact Profiler Based on Big Data
Author(s) -
Qing Li
Publication year - 2021
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1852/2/022073
Subject(s) - inflection point , rotation (mathematics) , point (geometry) , computer science , data point , translation (biology) , algorithm , scatter plot , software , tilt (camera) , table (database) , mathematics , geometry , artificial intelligence , data mining , biochemistry , chemistry , machine learning , messenger rna , gene , programming language
This article mainly studies the problem of labeling various parameter values of the contact profiler. The contour size of the instrument is analyzed by the least square method for the mathematical theory, and the data analysis information of each line and arc is established based on the background of big data. As a result, the corresponding mathematical model is established to realize the labeling of outline dimensions. First, perform precision processing on the horizontal data of the workpiece, use Excel software to make a scatter diagram, use the difference method to quickly search and locate the special inflection point coordinates, borrow these feature points to obtain the dimension of each data in turn, and combine the equations of straight lines and circles Find out the width and radius of the notch, find out the various indicators in turn, and finally sort and summarize them through the table. Next, the tilt data and the original data given for the workpiece are represented by a scatter graph. Using coordinate rotation and translation, the tilt angle is 7°24’59” clockwise and the radian is -0.13017. Compare the two sets of data After the difference, finally use segmented fitting to carry out horizontal correction.